Semiconductor element holding apparatus and semiconductor...

Details Semiconductor element holding apparatus and semiconductor... Semiconductor element holding apparatus and semiconductor...

2007-03-14

2010-02-09

Ghyka, Alexander G (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S460000, C438S464000, C257SE29324

Reexamination Certificate

active

07659132

ABSTRACT:
A semiconductor element holding apparatus includes a collet for suctioning a semiconductor element by negative pressure to hold the semiconductor element. The collet has a protrusion formed at the semiconductor element-holding surface thereof, and the protrusion is provided with a plurality of suction holes. The suction holes are opened to the semiconductor element-holding surface. The surface of the semiconductor element is held by the semiconductor element-holding surface of the protrusion of the collet.

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