Semiconductor pressure detecting device and manufacturing method

Details Semiconductor pressure detecting device and manufacturing method Semiconductor pressure detecting device and manufacturing method

1997-08-28

1998-09-22

Picardat, Kevin

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

438 53, H01L 2100

Patent

active

058113215

ABSTRACT:
A semiconductor pressure detecting device in which a pressure sensing element (2) made of semiconductor having a diaphragm portion (9), a pedestal (8) for supporting the pressure sensing element (2) and wires (5) connected to the pressure sensing element (2) are molded by a molding resin (6) not so as to mold the diaphragm portion (9), characterized in that a silicon resin layer (4) is adhered on an outer surface of the diaphragm portion (9).

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patent: 5585311 (1996-12-01), Ko

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