Self-aligned coating on released MEMS

Details Self-aligned coating on released MEMS Self-aligned coating on released MEMS

2004-04-19

2008-12-30

Ghyka, Alexander G (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S758000, C257SE21001, C257SE29324

Reexamination Certificate

active

07470557

ABSTRACT:
A method of making a semiconductor device including the steps of fabricating at least one component on a substrate and coating the component with a first self-aligned polymer film.

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patent: 2003/0160540 (2003-08-01), Miller et al.
patent: 2004/0123651 (2004-07-01), Hantschel et al.

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