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Self-aligned contact process using low density/low k dielectric

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Patent

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Self-aligned contact process using silicon spacers

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self-aligned contacts to gates

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Self-aligned gate formation using polysilicon polish with...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self-aligned poly-metal structures

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self-aligned process for fabricating memory cells with two...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self-aligned process for making asymmetric MOSFET using...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self-aligned T-shaped process for deep submicron Si MOSFET's fab

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self-aligned tin formation by N.sub.2.sup.+ implantation during

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Semiconductor apparatus having conductive thin films and manufac

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Semiconductor damascene trench and methods thereof

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Semiconductor device and a method for the production of the same

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Patent

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Semiconductor device and a method of manufacturing the same

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Semiconductor device and fabrication method for the same

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Semiconductor device and fabrication method thereof

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Semiconductor device and fabrication method thereof

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Semiconductor device and fabrication method using a germanium sa

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Semiconductor device and fabrication process thereof

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Semiconductor device and fabrication thereof

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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