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Reliable polycide gate stack with reduced sheet resistance...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Removal of silicon oxynitride material using a wet chemical...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Removing a high-k gate dielectric

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Removing silicon oxynitride of polysilicon gates in...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Replacement metal gate method

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Replacement metal gate transistor with metal-rich silicon...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Resistless methods of gate formation in MOS devices

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Salicide formation process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Salicide formation process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Salicide method for producing a semiconductor device using...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Selective CVD TiSi.sub.2 deposition with TiSi.sub.2 liner

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Selective deposition of noble metal thin films

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Selective deposition process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Selective etching of unreacted nickel after salicidation

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Selective salicidation process for electronic devices...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Selective WSix deposition

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self aligned channel implant, elevated S/D process by gate...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self aligned gate

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self-aligned contact process for semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Self-aligned contact process in semiconductor fabrication

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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