Reliable polycide gate stack with reduced sheet resistance...
Removal of silicon oxynitride material using a wet chemical...
Removing a high-k gate dielectric
Removing silicon oxynitride of polysilicon gates in...
Replacement metal gate method
Replacement metal gate transistor with metal-rich silicon...
Resistless methods of gate formation in MOS devices
Salicide formation process
Salicide formation process
Salicide method for producing a semiconductor device using...
Selective CVD TiSi.sub.2 deposition with TiSi.sub.2 liner
Selective deposition of noble metal thin films
Selective deposition process
Selective etching of unreacted nickel after salicidation
Selective salicidation process for electronic devices...
Selective WSix deposition
Self aligned channel implant, elevated S/D process by gate...
Self aligned gate
Self-aligned contact process for semiconductor device
Self-aligned contact process in semiconductor fabrication