Adhesion to copper and copper electromigration resistance

Adjustment of N and K values in a DARC film

Apparatus and method for deposition of thin films

Apparatus for atomic layer chemical vapor deposition

Apparatus for improving barrier layer adhesion to HDP-FSG...

Article comprising an oxide layer on a GaAs-based...

Article comprising an oxide layer on a GaAs-based...

Atomic layer deposition systems and methods including metal...

Barrier layer fabrication methods

Capacitor, methods of forming capacitors, methods for...

Chemical fluid deposition for the formation of metal and...

Chemical fluid deposition method for the formation of metal...

Chemical vapor deposition process

Crack inhibited composite dielectric layer

Creation of multiple gate oxide with high thickness ratio in fla

Deposition method of a dielectric layer

Deposition methods

Devices and methods of preventing plasma charging damage in...

Dielectric film deposition method and apparatus

Dielectric layer for semiconductor device and method of...