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Adhesion to copper and copper electromigration resistance

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Adjustment of N and K values in a DARC film

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Apparatus and method for deposition of thin films

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Apparatus for atomic layer chemical vapor deposition

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Apparatus for improving barrier layer adhesion to HDP-FSG...

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Article comprising an oxide layer on a GaAs-based...

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Article comprising an oxide layer on a GaAs-based...

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Atomic layer deposition systems and methods including metal...

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Barrier layer fabrication methods

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Capacitor, methods of forming capacitors, methods for...

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Chemical fluid deposition for the formation of metal and...

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Chemical fluid deposition method for the formation of metal...

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Chemical vapor deposition process

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Crack inhibited composite dielectric layer

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Creation of multiple gate oxide with high thickness ratio in fla

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Deposition method of a dielectric layer

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Deposition methods

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Devices and methods of preventing plasma charging damage in...

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Dielectric film deposition method and apparatus

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Dielectric layer for semiconductor device and method of...

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