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Ultra thin oxynitride and nitride/oxide stacked gate...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Ultra-thin gate oxide formation using an N2O plasma

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Ultrathin deposited gate dielectric formation using...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Use of SiD.sub.4 for deposition of ultra thin and controllable o

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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