4. Semiconductor device manufacturing: process
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Adhesion to copper and copper electromigration resistance

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Adjustment of N and K values in a DARC film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Apparatus and method for deposition of thin films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Apparatus for atomic layer chemical vapor deposition

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Apparatus for improving barrier layer adhesion to HDP-FSG...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Article comprising an oxide layer on a GaAs-based...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Article comprising an oxide layer on a GaAs-based...

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Atomic layer deposition systems and methods including metal...

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