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Lanthanum aluminum oxynitride dielectric films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Lightly nitridation surface for preparing thin-gate oxides

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Liquid-phase growth method, liquid-phase growth apparatus,...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Low dielectric constant insulation in VLSI applications

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Low k dielectric composite layer for intergrated circuit...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Low temperature process for multiple voltage devices

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Low temperature silicon compound deposition

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Lower temperature method for forming high quality...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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LPCVD furnace uniformity improvement by temperature ramp...

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