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Pattern and fabricating method therefor, device and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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PECVD oxide-nitride and oxide-silicon stacks for 3D memory...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Plasma processes for depositing low dielectric constant films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Pre-metal dielectric rapid thermal processing for sub-micron...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Process for applying a molten droplet coating for integrated...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Process for atomic layer deposition

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Process for coating an integrated circuit device with a molten s

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Process for fabricating a semiconductor structure having a self-

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Process for inhibiting crack formation in low dielectric...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Process for planarizing surface of a semiconductor device

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Process for the production of a semiconductor device having bett

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Process of forming metal films and multi layer structure

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