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Reduced water adsorption for interlayer dielectric

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Relaxed SiGe platform for high speed CMOS electronics and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Relaxed silicon germanium platform for high speed CMOS...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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