4. Semiconductor device manufacturing: process
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Gap-filling with uniform properties

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Gate technology for strained surface channel and strained...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Germanium as an antireflective coating and method of use

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Global planarization method for inter-layer-dielectric and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Graded anti-reflective coating for IC lithography

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Graded composite layer and method for fabrication thereof

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Graded oxide caps on low dielectric constant (low K)...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Growth of multi-component alloy films with controlled graded...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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