4. Semiconductor device manufacturing: process
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High density plasma and bias RF power process to make stable...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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High dielectric constant material deposition to achieve high...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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High tensile nitride layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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High-k thin film grain size control

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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HSQ dielectric interlayer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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