Ultrasonic-wave washing unit, ultrasonic-wave washing...

Details Ultrasonic-wave washing unit, ultrasonic-wave washing... Ultrasonic-wave washing unit, ultrasonic-wave washing...

2005-04-05

2005-04-05

Niebling, John F. (Department: 2812)

Semiconductor device manufacturing: process

Chemical etching

Combined with the removal of material by nonchemical means

C438S693000, C438S795000

Reexamination Certificate

active

06875696

ABSTRACT:
An ultrasonic-wave washing unit comprising an ultrasonic-wave vibrating plate to which an ultrasonic-wave vibrator is fixed by adhesive bonding, an ultrasonic-wave transmission plate opposed to the vibrating plate, a liquid supply means which supplies a liquid to a space defined between the vibrating plate and the transmission plate, and a liquid discharge means for discharging the liquid from the space.

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patent: 7-283183 (1995-10-01), None

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