Ultrasonic assisted etch using corrosive liquids

Details Ultrasonic assisted etch using corrosive liquids Ultrasonic assisted etch using corrosive liquids

2006-08-15

2006-08-15

Vinh, Lan (Department: 1765)

Semiconductor device manufacturing: process

Chemical etching

Liquid phase etching

C438S750000, C156S345110, C216S091000

Reexamination Certificate

active

07091132

ABSTRACT:
An ultrasonic etching apparatus for chemically-etching a workpiece is disclosed. The apparatus includes an outer tank at least partially filled with an aqueous solution, an inner tank at least partially disposed within the outer tank and in contact with aqueous solution, the inner tank at least partially filled with an etching solution, a lid engaged with the mouth of said inner tank; and an ultrasonic transducer coupled to the outer tank to impart ultrasonic energy to the etching solution in said inner tank. Also disclosed are methods of using the apparatus to etch workpieces.

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