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Selective etch process for making a semiconductor device...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Selective etching of carbon-doped low-k dielectrics

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Selective etching of low-k dielectrics

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Selective etching of low-k dielectrics

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Selective etching of oxides

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Selective etching of polysilicon

Semiconductor device manufacturing: process – Chemical etching
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Selective etching process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Selective etching processes for In 2 O 3 thin films in...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Selective etching processes of silicon nitride and indium...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Selective etching processes of silicon nitride and indium...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Selective etching using sonication

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Selective fabrication of high capacitance density areas in a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Selective growth process for group III-nitride-based...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Selective i-line BARL etch process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Selective nitride etching with silicate ion pre-loading

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Selective nitride liner formation for shallow trench isolation

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Selective oxidation of gate stack

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Selective oxide-to-nitride etch process using C.sub.4 F.sub.8 /C

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Selective oxygen-free etching process for barrier materials

Semiconductor device manufacturing: process – Chemical etching
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Selective partial curing of spin-on-glass by ultraviolet radiati

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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