Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate
2006-09-19
2006-09-19
Luu, Chuong Anh (Department: 2818)
Semiconductor device manufacturing: process
Chemical etching
Vapor phase etching
C438S240000, C438S243000, C438S386000
Reexamination Certificate
active
07109125
ABSTRACT:
Method for selective fabrication of high capacitance density areas in a low dielectric constant material and related structure are disclosed. In one embodiment, a first area of a dielectric layer is covered, for example with photoresist, while a second area of the dielectric layer is exposed to a dielectric conversion source such as E-beams, I-beams, oxygen plasma, or an appropriate chemical. The exposure causes the dielectric constant of the dielectric layer in the second area to increase. A number of capacitor trenches are etched in the second area of the dielectric. The capacitor trenches are then filled with an appropriate metal, such as copper, and a chemical mechanical polish is performed. The second area in which the capacitor trenches have been etched and filled has a higher capacitance density relative to the first area. In another embodiment, the exposure to the dielectric conversion source is not performed until after the chemical mechanical polish has been performed. In yet another embodiment, a blanket layer of metal, such as aluminum, is first deposited. The blanket layer of metal is then etched to form metal lines. Then a gap fill dielectric is utilized to fill the gaps between the remaining metal lines. A first area of the gap fill dielectric is then covered and a second area of the gap fill dielectric is exposed to a dielectric conversion source. After exposure to the dielectric conversion source, the dielectric constant of the gap fill dielectric in the second area increases. The metal lines in the second area can then be used as capacitor electrodes of a high density capacitor.
REFERENCES:
patent: 5928960 (1999-07-01), Greco et al.
patent: 6110842 (2000-08-01), Okuno et al.
patent: 6271127 (2001-08-01), Liu et al.
Brongo Maureen
Feiler David
Liu Q. Z.
Sherman Phil N.
Zhao Bin
Farjami & Farjami LLP
Luu Chuong Anh
Newport Fab LLC
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