In-situ sequential high density plasma deposition and etch...
In-situ sequential silicon containing hard mask layer/silicon la
In-situ SOG etchback and deposition for IMD process
Increased polish removal rate of dielectric layers using...
Increasing programming silicide process window by forming...
Indirect endpoint detection by chemical reaction
Inert plasma gas surface cleaning process performed insitu...
Inexpensive process for producing a multiplicity of...
Infinitely selective photoresist mask etch
Inhibition of tin oxide formation in lead free interconnect...
Innovative method of hard mask removal
Innovative method to build a high precision analog capacitor...
Insitu hardmask and metal etch in a single etcher
Insitu oxidation for polishing non-oxide ceramics
Insitu post etch process to remove remaining photoresist and...
Inspection method of compound semiconductor substrate,...
Insulated pad conditioner and method of using same
Insulating layer patterning method, insulating layer formed...
Insulation film etching method
Integrated arc and polysilicon etching process