Insulated pad conditioner and method of using same

Details Insulated pad conditioner and method of using same Insulated pad conditioner and method of using same

2007-07-24

2007-07-24

Everhart, Caridad (Department: 2891)

Semiconductor device manufacturing: process

Chemical etching

Liquid phase etching

C451S056000, C205S663000, C257SE21483

Reexamination Certificate

active

11405862

ABSTRACT:
A wafer planarization process with a conditioning tool having an electrical insulator that electrically insulates the abrasive surface of the conditioning tool. The electrical insulator extends the useful life of the abrasive surface of the conditioning tool by reducing the level of electrochemically driven corrosion.

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