Method for producing an integrated circuit having at least...

Method for producing contact structures

Method for producing defined polycrystalline silicon areas...

Method for producing narrow pores and structure having the...

Method for producing trenches for DRAM cell configurations

Method for production of a semiconductor structure

Method for prolonging life time of a plasma etching chamber

Method for protecting nonsilicided surfaces from silicide format

Method for providing pulsed plasma during a portion of a...

Method for providing whisker-free aluminum metal lines or...

Method for reducing a low volatility byproduct from a wafer...

Method for reducing antenna effect during plasma etching procedu

Method for reducing contact resistance of a semiconductor...

Method for reducing critical dimension and semiconductor...

Method for reducing critical dimension attainable via the...

Method for reducing dielectric overetch using a dielectric...

Method for reducing dielectric overetch using a dielectric...

Method for reducing dimensions between patterns on a hardmask

Method for reducing dimensions between patterns on a hardmask

Method for reducing dimensions between patterns on a...