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Method for manufacturing thin film semiconductor device and...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for marking a substrate using ionized gas

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for masking conducting layers to abate charge damage duri

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for metal etch using a dielectric hard mask

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for micro-mechanical structures

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for minimizing the critical dimension growth of a feature

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for minimizing the critical dimension growth of a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for minimizing variation in etch rate of...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for modifying a C4 semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for modifying nested to isolated offsets

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for monitoring self-aligned contact etching

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for multi-layer resist plasma etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for multi-layer resist plasma etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for multi-zone high-density inductively-coupled plasma ge

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for nanomachining high aspect ratio structures

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for patterning a layer of silicon, and method for...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for patterning a metallization layer by reducing...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for patterning a polysilicon gate with a thin gate oxide

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for patterning dielectric layers on semiconductor...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for patterning integrated circuit conductors

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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