Gas for plasma reaction and process for producing thereof
Gas manifold for uniform gas distribution and photochemistry
Gas mixture for etching a polysilicon electrode layer and etchin
Gas phase planarization process for semiconductor wafers
Gas phase planarization process for semiconductor wafers
Gas phase removal of SiO.sub.2 /metals from silicon
Gas pulsing for etch profile control
Gas-assisted etch with oxygen
Gate etch process
Gate etch process with extended CD trim capability
Gate stack and etch process
Gate trim process using either wet etch or dry etch approach...
Graded junction termination extensions for electronic devices
Graded MOS transistor junction formed by aligning a sequence of
Grayscale reticle for precise control of photoresist exposure
Grazing incident angle processing method for microelectronics la
Hard mask layer stack and a method of patterning
Hard mask method for forming chlorine containing plasma etched l
Hard mask method for transferring a multi-level photoresist patt
Hard mask process to control etch profiles in a gate stack