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Etch rate loading improvement

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etch selectivity inversion for etching along...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etch stop layer for etching FinFET gate over a large topography

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etch with photoresist mask

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etch with ramping

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etch-back method for dielectric layer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etch-back process for capping a polymer memory device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etch-back process for capping a polymer memory device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etchant and method of use

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etchant and method of use

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etchant for use in a semiconductor processing method and system

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etchant gas and a method for etching transistor gates

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etchant with selectivity for doped silicon dioxide over undoped

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etchant with selectivity for doped silicon dioxide over...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etchant with selectivity for doped silicon dioxide over...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etched interposer for integrated circuit devices

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etching a dielectric layer in an integrated circuit...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etching a metal hard mask for an integrated circuit structure

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etching aftertreatment method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Etching aluminum over refractory metal with successive plasmas

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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