Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate
2011-07-26
2011-07-26
Ha, Nathan W (Department: 2814)
Semiconductor device manufacturing: process
Chemical etching
Combined with coating step
C257SE27014, C257S355000
Reexamination Certificate
active
07985684
ABSTRACT:
A method of actuating a semiconductor device includes providing a transistor. The transistor includes a substrate. A first electrically conductive material layer, having a thickness, is positioned on the substrate. A second electrically conductive material layer is in contact with and positioned on the first electrically conductive material layer. The second electrically conductive material layer overhangs the first electrically conductive material layer. An electrically insulating material layer, having a thickness, is conformally positioned over the second electrically conductive material layer, the first electrically conductive material layer, and at least a portion of the substrate. The thickness of the first electrically conductive material layer is greater than the thickness of the electrically insulating material layer. A semiconductor material layer conforms to and is in contact with the electrically insulating material layer. A third electrically conductive material layer is nonconformally positioned over and in contact with a first portion of the semiconductor material layer. A fourth electrically conductive material layer is nonconformally positioned over and in contact with a second portion of the semiconductor material layer. A voltage is applied between the third electrically conductive material layer and the fourth electrically conductive material layer. A voltage is applied to the first electrically conductive material layer to electrically connect the third electrically conductive material layer and the fourth electrically conductive material layer.
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Nelson Shelby F.
Tutt Lee W.
Eastman Kodak Company
Ha Nathan W
Zimmerli William R.
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