Probe driving method, and probe apparatus

Process and apparatus for the elementary and chemical analysis o

Projection electron beam apparatus and defect inspection...

Projection electron microscope, electron microscope,...

Purification device for charged particle beam diaphragm

Quantitative compositional analyser for use with scanning electr

Rapid defect composition mapping using multiple X-ray...

Raster electron microscope

Reduction of charging effect and carbon deposition caused by...

Reflected electron detector and a scanning electron microscope d

Reflection electron diffractometer and method for observing micr

Remote control of a scanning electron microscope aperture...

Retractable cathodoluminescence detector with high ellipticity a

Rotatable support for selectively aligning a window with the cha

Rule based control for charged-particle beam instrument

Sample analyzing apparatus

Sample charging control in charged-particle systems

Sample dimension measuring method and scanning electron...

Sample dimension measuring method and scanning electron...

Sample electrification measurement method and charged...