Purification device for charged particle beam diaphragm

Details Purification device for charged particle beam diaphragm Purification device for charged particle beam diaphragm

1987-01-06

1989-02-07

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, 250399, 2505051, G01N 2300

Patent

active

048033693

ABSTRACT:
On a charged particle beam disphragm for confining the angular aperture of a charged particle beam striking a sample, contamination is caused by the impact of the charged particles. A metal material is sputtered by the ion sputtering technique, and the sputtered metal particles are attached over the surface of the contamination incurred on the charged particle beam diaphragm to cover the surface of the contamination. As a result, the charged particle beam diaphragm is substantially purified.

REFERENCES:
patent: 4066905 (1978-01-01), Daisler et al.
patent: 4135094 (1979-01-01), Hull
patent: 4471224 (1984-09-01), Cuomo et al.

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