Projection electron microscope, electron microscope,...

Details Projection electron microscope, electron microscope,... Projection electron microscope, electron microscope,...

2005-01-13

2008-11-25

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000

Reexamination Certificate

active

07456401

ABSTRACT:
The illuminating beam4emitted from the cathode1is incident on a deflector3. In a state in which a voltage is applied to the deflector3, the optical path of the illuminating beam4is altered by the deflector3; the illuminating beam4then passes through a common electron optical system7, and illuminates the surface of the sample6. In cases where no voltage is applied to the deflector3, the illuminating beam4passes directly through the deflector3, and is absorbed by an electron absorbing plate17. The illuminating beam4is attenuated when it passes through the common electron optical system7, so that the energy of this beam4is close to 0 [eV] at the point in time at which the beam4reaches the surface of the sample6. When the illuminating beam4is incident on the sample6, reflected electrons8are generated from the sample6. These reflected electrons8pass through the common electron optical system7, and in a case where no voltage is applied to the deflector3, these reflected electrons8pass through the image focusing electron optical system9, so that the electrons are projected onto an MCP detector10.

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patent: 6667477 (2003-12-01), Grzelakowski
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patent: 2002-141010 (2002-05-01), None
patent: 2002-216692 (2002-08-01), None

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