Projection electron beam apparatus and defect inspection...

Details Projection electron beam apparatus and defect inspection... Projection electron beam apparatus and defect inspection...

2009-10-16

2011-10-11

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S3960ML, C250S3960ML

Reexamination Certificate

active

08035082

ABSTRACT:
A sample is evaluated at a high throughput by reducing axial chromatic aberration and increasing the transmittance of secondary electrons. Electron beams emitted from an electron gun1are irradiated onto a sample7through a primary electro-optical system, and electrons consequently emitted from the sample are detected by a detector12through a secondary electro-optical system. A Wien filter8comprising a multi-pole lens for correcting axial chromatic aberration is disposed between a magnification lens10in the secondary electro-optical system and a beam separator5for separating a primary electron beam and a secondary electron beam, for correcting axial chromatic aberration caused by an objective lens14which comprises an electromagnetic lens having a magnetic gap defined on a sample side.

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