Reflection electron diffractometer and method for observing micr

Details Reflection electron diffractometer and method for observing micr Reflection electron diffractometer and method for observing micr

1990-06-04

1992-03-03

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, H01J 3729

Patent

active

050935739

ABSTRACT:
An improved RHEED apparatus and a method for observing step-like surface irregularities of a sample by the use of the improved RHEED apparatus.

REFERENCES:
patent: 4068123 (1978-01-01), Kokubo
patent: 4233509 (1980-11-01), Tamura et al.
patent: 4438332 (1984-03-01), Lichtenegger
patent: 4843029 (1989-06-01), Joyce et al.
patent: 4855013 (1989-08-01), Ohta et al.
patent: 4912313 (1990-03-01), Kato et al.
patent: 5010250 (1991-04-01), Elsayed-Ali

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