Rule based control for charged-particle beam instrument

Details Rule based control for charged-particle beam instrument Rule based control for charged-particle beam instrument

1997-01-29

1998-06-16

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

H01J 3728

Patent

active

057675155

ABSTRACT:
Rule-based control for charged-particle beam instrument, typified by a scanning electron microscope, capable of accurately controlling the excitation of plural lenses with a small amount of data. The instrument is equipped with a computer which is programmed with a fuzzy reasoning software inference engine, a pretreatment routine, a posttreatment routine, a rule base in which rules are stored, and a rule editor capable of editing the rules in the rule base. The fuzzy reasoning inference engine infers, by fuzzy reasoning, amounts (numerical values) which control the excitation of the lenses. The pretreatment routine normalizes parameters and enters the normalized variables into the inference engine. The posttreatment routine denormalizes output variables from the fuzzy reasoning inference engine.

REFERENCES:
patent: 5404012 (1995-04-01), Yamada
"A Fully Computer-Controlled Scanning Electron Microscope", Hiromu Fujioka et al., J. Electron Microsc., vol. 35 No. 3, pp. 215-219, Oct. 13, 1986.
"Knowledge-Based Sewerage Pump Control System With Fuzzy Inference", Kazuhiro Honda et al. has no date and page number.
"Development of a High Resolution Semi-in-Lens Digital Field Emission Scanning Electron Microscope: JSM-6430F", Youiti Yamamoto et al., JEOL News, vol. 32 E, No. 1, pp. 39-41 (1996)

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