4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type
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Vibration cancellation system for a charged particle beam appara

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Vibration cancellation system for scanning electron microscopes

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Void characterization in metal interconnect structures using...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Voltage contrast detector for a scanning electron beam instrumen

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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