Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-04-10
2007-04-10
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S307000, C702S040000, C702S134000
Reexamination Certificate
active
10796577
ABSTRACT:
Disclosed are methods and apparatus for characterizing defects by using X-ray emission analysis techniques. The X-rays are emitted in response to an impinging beam, such as an electron beam, directed towards the sample surface where a defect resides. It may also be used to help determine where the void(s) are with respect to the interconnect structure. Methods disclosed are for spatially locating defects in or on integrated circuits. Also disclosed are methods for identifying the elemental composition of defects and spatially locating different elemental components of defects.
REFERENCES:
patent: 3030507 (1962-04-01), Khol
patent: 3046399 (1962-07-01), Ladell
patent: 3213278 (1965-10-01), Spielberg
patent: 3663812 (1972-05-01), Koenig et al.
patent: 4472825 (1984-09-01), Jenkins
patent: 4885465 (1989-12-01), Nagatsuka et al.
patent: 4959848 (1990-09-01), Parobek
patent: 5187727 (1993-02-01), Vogler et al.
patent: 5237598 (1993-08-01), Albert
patent: 5457725 (1995-10-01), Sato
patent: 5594246 (1997-01-01), Sudo et al.
patent: 5703361 (1997-12-01), Sartore
patent: 5866903 (1999-02-01), Morita et al.
patent: 5877498 (1999-03-01), Sugimoto et al.
patent: 6407386 (2002-06-01), Dotan et al.
patent: 6448556 (2002-09-01), Cowley et al.
patent: 6664541 (2003-12-01), Nasser-Ghodsi et al.
patent: 6810105 (2004-10-01), Nasser-Ghodsi et al.
patent: 6855930 (2005-02-01), Okuda et al.
patent: 6924484 (2005-08-01), Wang et al.
patent: 2003/0223536 (2003-12-01), Yun et al.
Serulink, “Defect Topographic Maps Using a Non-Lambertian Photometric Stereo Method”, Applied Materials, Israel Ltd., Jul. 2002.
Beyer & Weaver, LLP
KLA-Tencor Technologies Corporation
Wells Nikita
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