4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type
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Object observation apparatus and object observation

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Object observing apparatus and method for adjusting the same

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Objective lens arrangement for use in a charged particle...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Observing a surface using a charged particle beam

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Observing method and its apparatus using electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Optical column for charged particle beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Organic substance analyzer

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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