4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type
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Gas blowing nozzle of charged particle beam apparatus and...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Gaseous backscattered electron detector for an environmental sca

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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