Reflected electron detector and a scanning electron microscope d

Details Reflected electron detector and a scanning electron microscope d Reflected electron detector and a scanning electron microscope d

1997-11-10

2000-02-29

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, 250399, H01J 3728, H01J 37244

Patent

active

060312300

ABSTRACT:
In a scanning electron microscope device having the plastic scintillator type reflected electron detector 17 that is installed below the front end surface 14a of the object lens 14 to detect reflected electrons from the specimen, the reflected electron detector 17 has the front end portion 38 of its scintillator 17a formed into the semicircular portion 44 having a radius almost equal to the radius of the front end surface 14a of the object lens 14. At least a part of the edge of the semicircular portion 44 is formed with the notched surface 39 that extends along the extension of the inclined surface 14b of the object lens 14. This increases the viewing angle of the optical microscope, which is used to locate the position of the specimen being observed, and also increases the solid angle of the detection plane of the detector with respect to the specimen. The reflected electron detector thus can arrest reflected electrons from the specimen efficiently.

REFERENCES:
patent: 3629579 (1971-12-01), Naitou
patent: 4177379 (1979-12-01), Fuukawa et al.
patent: 4217495 (1980-08-01), Robinson
patent: 4438332 (1984-03-01), Lichtenegger
patent: 4559450 (1985-12-01), Robinson et al.
patent: 5043583 (1991-08-01), Robinson
patent: 5191213 (1993-03-01), Ahmed et al.
patent: 5198675 (1993-03-01), Hikita et al.

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