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Macroanalyzer system

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Magnetically filtered low loss scanning electron microscopy

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Magnification compensation apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Mask inspection apparatus, mask inspection method, and...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Mask inspection apparatus, mask inspection method, and...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Material composition analysis system and method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Material composition analysis system and method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Materials analysis using backscatter electron emissions

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Measurement of film thickness by inelastic electron scattering

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Measuring method and its apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Method and an apparatus of an inspection system using an...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Method and an apparatus of an inspection system using an...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Method and an apparatus of an inspection system using an...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Method and an apparatus of an inspection system using an...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Method and an apparatus of an inspection system using an...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Method and an apparatus of an inspection system using an...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Method and apparatus for aberration-insensitive electron...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Method and apparatus for accurate e-beam metrology

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Method and apparatus for analyzing fine grained substances

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Method and apparatus for analyzing sample

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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