Retractable cathodoluminescence detector with high ellipticity a

Details Retractable cathodoluminescence detector with high ellipticity a Retractable cathodoluminescence detector with high ellipticity a

1995-06-14

1996-10-29

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 37244

Patent

active

055699200

ABSTRACT:
A cathodoluminescence detection system including a semi-ellipsoidal mirror of high ellipticity, with the mirror constructed of material of low atomic number to minimize interference caused by backscattered electrons. An emission radiation guide is mounted in line with the axis of rotation of the mirror to optimize CL radiation collection. Low detector height provides high spatial resolution in electron beam systems.

REFERENCES:
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patent: 4900932 (1990-02-01), Schafer et al.
patent: 4929041 (1990-05-01), Vahala et al.
patent: 5010253 (1991-04-01), Braglia et al.
patent: 5264704 (1993-11-01), Phang et al.
patent: 5382796 (1995-01-01), Koike
Journal of Microscopy, vol. 107, Pt. 2, Jul., 1976, pp. 107-128.

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