4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type
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T-shaped electron-beam microcolumn as a general purpose scanning

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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TEM with aberration corrector and phase plate

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Testing apparatus using charged particles and device...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Testing apparatus using charged particles and device...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Testing apparatus using charged particles and device...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Testing of interconnection circuitry using two modulated...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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TFT array inspecting apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Three-stage secondary emission electron detection in electron mi

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Tool-to-tool matching control method and its system for...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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