Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1998-01-27
2000-06-06
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250307, 250399, H01J 3728, G01N 2300
Patent
active
060721782
ABSTRACT:
The invention provides a sample analyzing apparatus to identify a particle accurately, securely and rapidly. After a wafer is pre-aligned and its wafer number is read, a recipe is read. The wafer is carried to an XY stage and aligned. A wafer map is read and displayed. An operator specifies a particle desired to be analyzed of particles on the wafer and moves a stage so that that particle is just below an electron beam. A scanning electron beam is irradiated over the specified particle so as to form an SEM image. The SEM image is compared to a corresponding reference SEM image and a precision positioning of the specified particle is carried out. The electron beam is irradiated to the specified particle and an emitting characteristic X-ray is detected. Its spectrum is displayed. The spectrum is compared to the reference spectrum and then reference spectrums estimated to be the same are listed up.
REFERENCES:
patent: 3812288 (1974-05-01), Walsh et al.
patent: 4620284 (1986-10-01), Schnell et al.
patent: 5142149 (1992-08-01), Isakazawa et al.
patent: 5453613 (1995-09-01), Gray et al.
patent: 5483065 (1996-01-01), Sato et al.
patent: 5596195 (1997-01-01), Obori et al.
patent: 5659172 (1997-08-01), Wagner et al.
patent: 5866903 (1999-02-01), Morita et al.
patent: 5945833 (1999-08-01), Mil'shetin et al.
Anderson Bruce C.
Hitachi , Ltd.
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