Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2009-09-15
2011-12-20
Berman, Jack (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S307000
Reexamination Certificate
active
08080789
ABSTRACT:
The present invention suppresses decreases in the volumes of the patterns which have been formed on the surfaces of semiconductor samples or of the like, or performs accurate length measurements, irrespective of such decreases. In an electrically charged particle ray apparatus by which the line widths and other length data of the patterns formed on samples are to be measured by scanning the surface of each sample with electrically charged particle rays and detecting the secondary electrons released from the sample, the scanning line interval of said electrically charged particle rays is set so as not to exceed the irradiation density dictated by the physical characteristics of the sample. Or measured length data is calculated from prestored approximation functions.
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“Scanning Electron Microscoopy” by Michael T. Postek, Jr. and Ladd Research Industries, Inc., pp. 30-33 (1980).
Ezumi Makoto
Fukaya Ritsuo
Kawada Hiroki
Nasu Osamu
Otaka Tadashi
Berman Jack
Dickstein & Shapiro LLP
Hitachi , Ltd.
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