Quantitative compositional analyser for use with scanning electr

Details Quantitative compositional analyser for use with scanning electr Quantitative compositional analyser for use with scanning electr

1983-08-01

1985-12-17

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, G01N 23225

Patent

active

045594503

ABSTRACT:
An analysis system for a scanning electron microscope having a backscattered electron detector. The output of the detector is amplified, processed by an analogue to digital converter, multi-channel analyser, and digital conversion and processing circuit to generate a signal indicative of the atomic number factor of the specimen. Calculation of stoichiometric valence combinations of non-elemental specimens is also disclosed. A calibration device is also disclosed.

REFERENCES:
patent: 3103584 (1963-09-01), Shapiro et al.
patent: 4034220 (1977-07-01), le Gressus et al.
J. W. Colby; Backscattered and Secondary Electron Emission as Ancillary Techniques in Electron Probe Analysis, Adv. Electron. Electron Phys., Supp. 6, pp. 177-196 (1969).
R. Castring; Electron Probe Analysis, Adv. Electron. Electron Phys., 13, (1960), pp. 317-386.
"Backscattered Electrons as an Analytical Technique," R. E. Ogilve, Fourth Symposium on Electron Beam Tech., Mar. 1962.

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