Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-11-27
2007-11-27
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S307000, C250S305000, C250S306000, C250S442110, C250S492210, C073S105000
Reexamination Certificate
active
11201222
ABSTRACT:
A probe driving method and a probe apparatus for bringing a probe into contact with the surface of a sample in a safe and efficient manner by monitoring the probe height. Information about the height of the probe from the sample surface is obtained by detecting a probe shadow (54) appearing immediately before the probe contacts the sample, or based on a change in relative positions of a probe image and a sample image that are formed as an ion beam is irradiated diagonally.
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Azuma Junzo
Hamamura Yuichi
Ishitani Tohru
Koike Hidemi
Sekihara Isamu
Berman Jack I.
Hashmi Zia R.
Hitachi , Ltd.
Hitachi ULSI Systems Co. Ltd.
Mattingly ,Stanger ,Malur & Brundidge, P.C.
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