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Fixture for in-situ noncontact monitoring of wet chemical etchin

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Fixtures for processing a workpiece in a supercritical fluid

Etching a substrate: processes – Gas phase etching of substrate
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Fluoride gas etching of silicon with improved selectivity

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Fluorine free integrated process for etching aluminum...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Focused ion beam process for removal of copper

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Forming surface features using self-assembling masks

Etching a substrate: processes – Gas phase etching of substrate
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Gallium-nitride deposition substrate, method of...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Gallium-nitride deposition substrate, method of...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Gas composition for dry etching and process of dry etching

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Gas distribution system

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Gas for removing deposit and removal method using same

Etching a substrate: processes – Gas phase etching of substrate
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Gas polishing method

Etching a substrate: processes – Gas phase etching of substrate
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Gas purge protection of sensors and windows in a gas phase...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Gas-phase etching and regrowth method for Group III-nitride crys

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Gas-phase silicon etching with bromine trifluoride

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Hard masking method for forming oxygen containing plasma etchabl

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Heat treatment jig for semiconductor wafers and a method for tre

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Patent

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Hermetic low dielectric constant layer for barrier applications

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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HF vapor phase wafer cleaning and oxide etching

Etching a substrate: processes – Gas phase etching of substrate – Etching vapor produced by evaporation – boiling – or sublimation
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High aspect ratio contacts

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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