Plasma reactor and processes using RF inductive coupling and sca

Plasma reactor having a dual mode RF power application

Plasma reactor having a symmetric parallel conductor coil...

Plasma reactor with enhanced plasma uniformity by gas addition,

Plasma reactor with heated source of a polymer-hardening precurs

Plasma state monitoring to control etching processes and...

Plasma state monitoring to control etching processes and...

Plasma surface treatment method and resulting device

Plasma surface treatment method and resulting device

Plasma surface treatment method, quartz member, plasma...

Plasma treating apparatus and plasma treating method

Plasma treatment apparatus

Plasma treatment apparatus and method for operating same

Plasma treatment method and plasma treatment system

Plasma treatment method utilizing an amplitude-modulated high fr

Plasma uniformity control for an inductive plasma source

Plasma-etching method and apparatus therefor

Plasma-inert cover and plasma cleaning process

Polysilicon/polycide etch process for sub-micron gate stacks

Position detecting method and apparatus