Plasma surface treatment method, quartz member, plasma...

Details Plasma surface treatment method, quartz member, plasma... Plasma surface treatment method, quartz member, plasma...

2007-07-27

2010-12-28

Ahmed, Shamim (Department: 1713)

Etching a substrate: processes

Gas phase etching of substrate

Application of energy to the gaseous etchant or to the...

C427S575000, C118S715000, C438S710000, C216S058000

Reexamination Certificate

active

07857984

ABSTRACT:
A plasma surface treatment method for performing a surface treatment on a quartz member used under a plasma-exposed environment by using a plasma having an ion energy greater than about 5.3 eV. The plasma has, near a surface of the quartz member, an electron temperature higher than or equal to about 2 eV. Further, in a plasma processing apparatus for generating a plasma by introducing a microwave into a processing chamber through a planar antenna having a plurality of slots, the surface treatment is carried out for about 30-300 seconds by using a plasma of a processing gas containing Ar gas and N2gas under conditions of a processing pressure lower than or equal to about 15 Pa and a microwave power higher than or equal to about 0.9 W/cm2, the surface treatment being repeated 25 to 2000 times.

REFERENCES:
patent: 5242561 (1993-09-01), Sato
patent: 6250250 (2001-06-01), Maishev et al.
patent: 2004/0033361 (2004-02-01), Hamaguchi
patent: 2004/0102053 (2004-05-01), Kitagawa et al.
patent: 2004/0221809 (2004-11-01), Ohmi et al.
patent: 2005/0205013 (2005-09-01), Nakanishi et al.
patent: 2006/0275710 (2006-12-01), Yamazaki et al.
patent: 2000-294550 (2000-10-01), None
patent: 2001-0072001 (2001-07-01), None
patent: 10-2005-0075442 (2005-07-01), None
English Translation of JP-2000-294550 (Emi et al).

Affiliated with

Also associated with

Rating

Plasma surface treatment method, quartz member, plasma... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Plasma surface treatment method, quartz member, plasma..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Plasma surface treatment method, quartz member, plasma... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4214534