Plasma treatment method utilizing an amplitude-modulated high fr
Plasma uniformity control for an inductive plasma source
Plasma-etching method and apparatus therefor
Plasma-inert cover and plasma cleaning process
Polysilicon/polycide etch process for sub-micron gate stacks
Position detecting method and apparatus
Post etch inspection system
Post exposure resist bake
Post exposure resist bake
Power control and delivery in plasma processing equipment
Pre-endpoint techniques in photoresist etching
Precision dielectric etch using hexafluorobutadiene
Preparation and coating of composite surfaces
Procedure for etching of materials at the surface with...
Procedure for etching of materials at the surface with...
Process for ashing organic materials from substrates
Process for ashing organic materials from substrates
Process for cleaning CVD units
Process for etching copper containing metallic film and forming
Process for etching oxide using a hexafluorobutadiene and...