Method of modulating resonant frequency of torsional MEMS...

Method of operating a capacitively coupled plasma reactor...

Method of photoresist removal in the presence of a...

Method of plasma etching low-k dielectric materials

Method of plasma etching transition metal oxides

Method of polishing CVD diamond films by oxygen plasma

Method of processing organic film using plasma etching and...

Method of processing PFC and apparatus for processing PFC

Method of processing substrates

Method of producing a biocompatible prosthesis

Method of producing thin film magnetic head

Method of providing sacrificial spacer for micro-mechanical devi

Method of reducing aluminum fluoride deposits in plasma etch...

Method of reducing notching during reactive ion etching

Method of reducing undesired etching of insulation due to...

Method of removing hard carbon film formed on inner circumferent

Method of removing oxide film on a substrate with hydrogen...

Method of treating a mask layer prior to performing an...

Method of treating samples

Method of wafer cleaning after metal etch