Method of photoresist removal in the presence of a...

Details Method of photoresist removal in the presence of a... Method of photoresist removal in the presence of a...

2006-01-31

2006-01-31

Olsen, Allan (Department: 1763)

Etching a substrate: processes

Gas phase etching of substrate

Application of energy to the gaseous etchant or to the...

C216S069000, C438S725000, C438S727000, C438S731000

Reexamination Certificate

active

06991739

ABSTRACT:
A method of photoresist removal is described. A substrate is located in a processing chamber. A mixture of gases is excited, the mixture comprising a majority component of a reducing process gas and a minority component of between 0.1% and 10% by volume of an oxidizing process gas. Reactive gas species are thereby generated. A photoresist layer with an exposed dielectric layer on the substrate in the chamber is then exposed to the reactive gas mixture to selectively remove the photoresist layer from the dielectric layer.

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