Diffusion patterning process and screen therefor

Details Diffusion patterning process and screen therefor Diffusion patterning process and screen therefor

1993-10-21

1995-05-02

Powell, William

Etching a substrate: processes

Gas phase etching of substrate

Irradiating, ion implanting, alloying, diffusing, or...

216 87, 216 58, 216 83, 216 41, B44C 122, B29C 3700

Patent

active

054116287

ABSTRACT:
A non-photographic diffusion patterning method for making patterns in organic films utilizing a screen having a plurality of recessed polygon-shaped apertures.

REFERENCES:
patent: 5032216 (1991-07-01), Felten
patent: 5209814 (1993-05-01), Felten et al.
patent: 5260163 (1993-11-01), Nebe et al.
patent: 5275689 (1994-01-01), Felten et al.

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